Liquid flow sensor for low-volume dosing applications

Swiss sensor manufacturer Sensirion is launching a flow sensor for flow rates below 2 cc/sec (120 ml/min) with hydrocarbon-based liquids such as photoresists and solvents. Designed for use in high-purity fluid handling applications in the semiconductor, PV and flat panel display industries, the new SLQ-QT105 sensor features a short measurement response time of approximately 40 ms and very high sensitivity for flow rates down to 0.05 cc/sec (3 ml/min). Detection of air bubbles in the microliter range is also possible.

Flow is measured without moving parts and non-invasively through the wall of a straight flow path. All wetted materials are made from Teflon® or quartz glass. The compact, lightweight device is equipped with fittings for 4x3mm PFA tubing. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

According to product manager Jonas Horn, the SLQ-QT105 opens new perspectives for high-purity process control by remedying the shortage of precise, reliable, fast and inexpensive sensors for flow rates in the low milliliter range. Mechanical solutions, such as small paddlewheels and ultrasonic flow meters, are often unable to fulfill requirements due to their slow response, problems with bubbles, and inability to measure flow rates below 100 ml/min repeatably. With the SLQ-QT105, the advantages of CMOSens® Technology are now available for the first time for use in high-end semiconductor applications.

About Sensirion

The Swiss sensor manufacturer Sensirion AG is a leading international supplier of CMOS-based sensor components and systems. Its range of high-quality products includes humidity and temperature sensors, mass flow meters and controllers, gas and liquid flow sensors, and differential pressure sensors. Sensirion supports its international OEM customers with tailormade sensor system solutions for a wide variety of applications. Among others, they include analytical instruments, consumer goods, and applications in the medical technology, automotive and HVAC sectors. Sensirion products are distinguished by their use of patented CMOSens® technology. This enables customers to benefit from intelligent system integration, including calibration and digital interfaces. Sensirion’s competence as a reliable OEM partner is underlined by its quality management system, which was certified in March 2008 in accordance with the ISO/TS 16949 standard.