Innovative miniaturized 3D MID-Flow Sensor

2E mechatronic GmbH & Co. KG: Thermal Flow Sensors are ideally suitable for measuring minor deviations in pressure and possess the highest sensitivity at low flow rates, as well as a good zero point stability. Conversely Membrane Pressure Sensors operate with a characteristic quadratic pump that shows the lowest sensor sensitivity at the lowest pressure. By using a Thermal Flow Sensor to measure minor deviations in pressure costs can be reduced by a tenth compared to using a Pressure Sensor.

The challenge was to find a reliable technology that had simple and robust capillary flow channels and that could be adjusted to the desired pressure loss. 2E mechatronic follows the concept of producing the necessary pressure loss through monolithically intergrated flow channel by using a MEMS Chip to scale the target differential pressure of the measurement range of the Flow Sensor. The intergration of the fluxionary, electrical and mechanical functions can be realised through an extremely miniaturised MID housing.

The 3D layout has been designed so that the Sensor Chip with the intergrated channel can be electrical contacted using a bonding process. Intake and outlet openings are located on the edge of the site into which the chip has been bonded. The size and location of the external electrical connecting surfaces can be achieved by using a 2.5 mm standard grid. These are arranged symetrically on both sides of the housing and enable a reliable soldering with a standard process. Through the above mentioned processes 2E has been able to conduct a complete innovative 3D - MID housing as an SMD device.

The MID Flow Sensor can be used as a differential pressure sensor in bypass as well as in direct operation. It offers a higher accuracy at a lower power consumption (< 10 mW). The Sensor can be used for gas as well as liquids. The maximum volumetric flow in direct operation is for example 10 ml/min for air. With the SMD/MID concept a highly integrated and extremely precise sensor can be realised for standard handling of electronic devices. At the same time the flexibility of usage is considerably higher. Initial uses of climate/air conditioning units have been successful. Possible applications, among others, are in medicine technology or in the automotive sector.

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