New Catalog on UHV-Compatible Motorized Positioners, Linear Stages, Rotary Stages

In its new catalog, PI miCos presents on over 180 pages precision positioners and motion control equipment for use in UHV environments to 10-10 hPa. Vacuum environments are required in many of today's leading edge applications in fields as diverse as semi-conductor testing and manufacturing, X-ray spectrometry, high energy physics, scanning electron microscopy (SEM), and astronomy / aerospace technologies.

PI (Physik Instrumente) and PI miCos provide extensive expertise in designing and manufacturing precision positioning systems for ultrahigh vacuum environments. Motorized linear or rotary stages, piezo positioners and actuators as well as parallel-kinematic six axis Hexapods are available for different vacuum levels to UHV 10-10 hPa. Additionally, PI and PI miCos use their profound knowledge for offering complex custom motion systems and instrumentation for extreme applications, such as found in beamlines and synchrotrons.

The catalog explains technical terms, the different preparation steps and the equipment used for testing, in addition to listing product specifications and drawings.

PI miCos in Brief
The miCos GmbH was founded in Eschbach near Freiburg, Germany, in 1990. As PI miCos, it now belongs to PI Group (Physik Instrumente), located in Karlsruhe, Germany. With currently more than 50 employees, the company develops, produces and markets innovative motion systems and components for high-precision positioning applications throughout the world. A main focus is on optical metrology in research and industry. For this purpose, PI miCos offers customized system solutions with multiple axes in addition to a comprehensive standard program. Wide-ranging application know-how guarantees the implementation of technically demanding solutions. Flexible positioning systems for ultrahigh vacuum applications are a good example of this, as are parallel-kinematic Hexapods with six degrees of freedom and systems with air bearing axes for highest running accuracy.