New Piezo Scanner from PI

Small Footprint with Large Aperture

With the P-763 piezo scanner, PI (Physik Instrumente) comple-ments its product line of precision piezo-driven XY stages with clear aperture. This XY nanopositioning system with 70 mm side length features a large 30 mm x 30 mm clear aperture and is suited for sample handling and positioning as well as for transmitted-light applications.

The P-763 is equipped with PICMA® actuators for high reliability, capacitive sensors for high position stability and high resolution, as well as frictionless flexure joints. With these technical features, the P-763 achieves a 200 µm travel range per axis with a non-linearity of 0.02% and a resolution below 1 nm.

The resonant frequency of 180 Hz achieved at this long 200 µm travel range is high and allows for a large dynamic bandwidth of the positioning system. For attaining the system's elevated stiffness, PICMA® actuators with a large footprint were selected. For a highly dynamic, nanometer-precise operation the P-763 is suited for con-trol with the powerful E-709.CHG digital controller.

PI in Brief
Well-known for the high quality of its products, PI (Physik Instru-mente) has been one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. With four sites in Germany and ten sales and service offices abroad, the PI Group is represented internationally.