Small size and high resolution for 10-6 hPa: Miniature stage only 24 mm wide with a resolution of 0.5 nm

Physik Instrumente (PI) has now introduced vacuum-compatible versions of the LPS-24 series: Under vacuum conditions down to 10-6 hPa, the miniature stages of only 24 mm in width achieve a sub-nanometer resolution over a travel range of 15 mm.

Thus, they fulfil important requirements for the positioning of optical and mechanical components or for the adjustment and manipulation of samples in vacuum with a confined space.

The position is measured with an integrated linear encoder that has a resolution of 150 nm or 20 nm. PI's own linear encoder PIOne even achieves a resolution of 0.5 mm and a minimum step size of 1 nm.

A version of LPS-24 for ultra-high vacuum up to 10-9 hPa is available. It allows the smallest incremental motions of 40 nm.

Smooth nanostepping mode
In the stage series LPS-24 PI uses directly driven NEXACT® stepping drives. They combine the benefits of piezo actuators as regards resolution, stiffness and vacuum compatibility with long travel ranges. A position-controlled system with NEXACT® drive allows a constant and consistent nanostepping mode along a predefined motion profile to the target position. Thanks to this functional principle, the LPS-24 linear positioning stages reach not only a high positioning accuracy, but also a high path accuracy.

During the stepping motion, the contact between individual actuators and the moved rod is based only on static friction. Besides, this results in a substantial increase in the lifetime and reliability of the drives.

Easy system integration and extensive software
The E-861 controller can be used to operate the miniature positioning stages easily and accurately: It supports the motion types of the piezo stepping drive and is adapted to the requirements of the mechanical system. As a result of the controller's networking capability, up to 16 controllers can be driven simultaneously via one computer interface.

All parameters can be set and checked via software. For start-up and system configuration, the PIMikroMove® program is included in the scope of delivery. Connection to custom software is possible via LabVIEW drivers and DLLs.

PI in Brief
Well-known for the high quality of its products, PI (Physik Instrumente) has been one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. With four sites in Germany and ten sales and service offices abroad, the PI Group is represented internationally.