Versatile mass flow controller with ultra fast settling time

The Swiss sensor manufacturer Sensirion is showing its new digital mass flow controller, suitable for diverse applications in the industrial and medical technology sectors, at the Semicon West trade show in the USA. The new SFC5000 Series leverages Sensirion’s CMOSens® Technology to provide extremely high accuracy, repeatability and reliability at a very attractive price.

The SFC5000 Series with its excellent long-term stability enables precise control over a wide control range of 1000:1. Its ultra-fast settling time is 50 milliseconds. The excellent performance of the mass flow controller is based on Sensirion’s innovative CMOSens® Technology, which combines the high-precision sensor element and the analog and digital signal processing circuitry on a single tiny CMOS silicon chip. The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The new mass flow controller features both analog and digital interfaces, enabling new features such as optional multigas, gas recognition and self-test capability.

The SFC5000 Series mass flow controller operates from a standard supply voltage of 14–24 VDC. It can be used with input pressures up to 10 bar (145 psi), and it is resistant to electromagnetic interference (EMI). Due to exceptionally fast reaction time of the flow chip combined with fast control algorithm and valve, inlet pressure fluctuations can be regulated in real time providing stable output flow profile. The mass flow controller features a vacuum-tight stainless steel package of the flow chip which is mounted on a sturdy aluminum or stainless steel flow body. The new SFC5000 is available with various connection options (down-mount, C-/W-seal, Swagelok, VCR and VCO). All this makes the new mass flow controller ideal for controlling and monitoring mass flow in many different applications such as plasma etching and deposition, process automation, analytical instrumentation, medical anesthesia/ventilation equipment and other areas.

Sensirion has a strong competence and experience in offering customized solutions. Sensirion’s new SFC5000 Series mass flow controller is available for large volume OEM projects. The new digital MFC platform facilitates fast prototyping of OEM samples and offers significant advantages in after sale support. Furthermore, a new evaluation kit is released to support developers in quick and economical evaluation and qualification of the new mass flow controllers.

Visit Sensirion on July 8-10 at Semicon West in San Francisco, CA, USA, Booth 1942, to learn more about the new digital mass flow controller. Additional information is also available on the Sensirion website at www.sensirion.com/sfc5000.

About Sensirion
Sensirion AG, headquartered in Staefa, Switzerland, is the world's leading manufacturer of digital microsensors and systems. The product range includes humidity and temperature sensors, mass flow controllers, gas and liquid flow sensors, and differential pressure sensors. An international network with sales offices in the USA, Germany, China, Taiwan, Japan and Korea supplies international OEM customers with tailor-made sensor system solutions for a vast range of applications. Among other things, these include analytical instruments, consumer goods and automobiles, as well as the medical and HVAC industries. One of the hallmark features of Sensirion products is the use of patented CMOSens technology. CMOS-based sensor elements and systems permit intelligent system integration, including calibration and a digital interface. Sensirion's credentials as a reliable OEM supplier are underscored by its ISO/TS 16949 certification.