SONOTEC attends European CMP and WET Users Group Meeting in Leuven, Belgium

The spring conference of the European CMP and WET Users Group will take place in Leuven, Belgium, from April 10 to 11, 2025. As an exhibitor, SONOTEC will be presenting its SEMIFLOW® sensor series for non-contact flow measurement of liquids.

At the European CMP and WET Users Group Meeting on April 10 and 11 in Leuven, Belgium, SONOTEC will continue its commitment as an exhibitor in this series of events. The specialist for ultrasonic flow sensors will present its SEMIFLOW sensor family, which has been specially developed for the semiconductor industry. Together with the industrial SONOCHECK air bubble detectors, the compact SEMIFLOW flow sensors can be used in various process steps of wafer production and processing.

The conference in Leuven focuses on chemical mechanical planarization / polishing (CMP) and offers excellent opportunities to discuss technologies, new applications, metrology, process control and much more. For CMP professionals, the conference is the ideal meeting place to talk about innovations and exchange experiences.

“The semiconductor market is dynamic and challenging, driven by global challenges and a growing demand for innovative technologies. Despite these volatile market conditions, we have successfully strengthened our market position. Through strategic investments, close partnerships and a high level of innovation, we have been able to sustain our growth in the semiconductor industry. In particular, events such as the European CMP and WET Users Group Meeting provide us with excellent opportunities to exchange ideas with industry experts and to adapt our sensor technology even better to the needs of the semiconductor market", explains Anika Baumhauer, International Strategy and Sales Manager at SONOTEC.

SONOTEC has developed the compact and robust flow sensors of the SEMIFLOW series to efficiently measure and monitor the transfer and distribution of chemicals and other liquids within a fab and within a particular process. For example, the sensors are used to measure the slurry supply in CMP processes or to monitor the filling volume of etching processes in wet bench lines. The flow rate or volume is determined from the outside of industry-specific rigid plastic tubes and pipes using clamp-on architecture, eliminating any risk of contamination or leakage.

The robust sensor material enables a long product life cycle and the minimal power consumption ensures low operating costs. The non-contact flow meters can therefore contribute to sustainability strategies in the fabs. The SEMIFLOW sensors are also characterized by their compact housing design with integrated electronics. They require little space in the plant and can be easily integrated into existing process chains and architectures. SONOTEC offers the SEMIFLOW series in various sizes to cover a comprehensive range of diameters of PFA, PTFE and other hard plastic pipes.

SONOTEC offers the SEMIFLOW CO.66 PI Ex1 sensor series for flow measurement in potentially explosive environments. The intrinsically safe ultrasonic flow meters are designed for safe operation in Zone 1 production areas in accordance with ATEX/IECEx. The sensors are protected against explosion hazards from gases and vapors in accordance with the standards of gas group IIB; the equipment protection level (EPL) is “Gb”.

Meet SONOTEC from April 10 to 11, 2025 during the European CMP and Wet Users Group Meeting at the R&D Center imec in Leuven, Belgium.

About SONOTEC

Founded in 1991, SONOTEC GmbH has developed into one of the world's leading product and solution specialist for innovative measurement technologies. With more than 200 employees and a modern corporate structure comprising three independent business units – Non-Invasive Fluid Monitoring, Preventive Maintenance and Nondestructive Testing - the technology leader operates its global sales activities from the Halle (Saale) based German headquarter. The distributed portfolio includes customized ultrasonic transducers and sensors as well as testing devices and measurement solutions for a variety of different industries.